Silicon Bulk Micromachined Hybrid Dimensional Artifact
نویسندگان
چکیده
منابع مشابه
[1] Greenwood, J.C. “A silicon bulk micromachined
Design, fabrication, and testing of multi-axis CMOS piezoresistive accelerometers is described. Vertical axis accelerometers have been fabricated in multiple processes using a production tested maskless bulk etch step. Horizontal axis accelerometers have also been fabricated and require an additional assembly step. Acceleration sensing in based on the piezoresistive behavior of the gate polysil...
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ژورنال
عنوان ژورنال: NCSLI Measure
سال: 2010
ISSN: 1931-5775,2381-0580
DOI: 10.1080/19315775.2010.11721516